Dry Etchant

Seastar’s Research and Development team is dedicated to providing high quality solutions to the semiconductor industry that both improve safety and performance.  As part of our ongoing research, we have developed a Dry Etchant that can be used for a variety of applications including Device Structure Etching and In-Situ Deposition Chamber Cleaning.   Please view the videos below to better understand this product’s capabilities. If you would like to find out more about this product please contact our customer service department at customersupport@seastarchemicals.com.

Cobalt Etching

Tantalum Pentoxide Etching

Tantalum Oxide Nitride Etching

Titanium Nitride Etching

Titanium Dioxide Etching